Fundamental Principles of Optical Lithography (ePub)
The Science of Microfabrication
(Sprache: Englisch)
The fabrication of an integrated circuit requires a variety of
physical and chemical processes to be performed on a semiconductor
substrate. In general, these processes fall into three categories:
film deposition, patterning, and semiconductor doping....
physical and chemical processes to be performed on a semiconductor
substrate. In general, these processes fall into three categories:
film deposition, patterning, and semiconductor doping....
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The fabrication of an integrated circuit requires a variety of
physical and chemical processes to be performed on a semiconductor
substrate. In general, these processes fall into three categories:
film deposition, patterning, and semiconductor doping. Films of
both conductors and insulators are used to connect and isolate
transistors and their components.
By creating structures of these various components millions of
transistors can be built and wired together to form the complex
circuitry of modern microelectronic devices. Fundamental to all of
these processes is lithography, ie, the formation of
three-dimensional relief images on the substrate for subsequent
transfer of the pattern to the substrate.
This book presents a complete theoretical and practical
treatment of the topic of lithography for both students and
researchers. It comprises ten detailed chapters plus three
appendices with problems provided at the end of each chapter.
Additional Information:
Visiting href="http://www.lithoguru.com/textbook/index.html">http://www.lithoguru.com/textbook/index.html enhances
the reader's understanding as the website supplies information on
how you can download a free laboratory manual, Optical Lithography
Modelling with MATLAB®, to accompany the textbook. You can
also contact the author and find help for instructors.
physical and chemical processes to be performed on a semiconductor
substrate. In general, these processes fall into three categories:
film deposition, patterning, and semiconductor doping. Films of
both conductors and insulators are used to connect and isolate
transistors and their components.
By creating structures of these various components millions of
transistors can be built and wired together to form the complex
circuitry of modern microelectronic devices. Fundamental to all of
these processes is lithography, ie, the formation of
three-dimensional relief images on the substrate for subsequent
transfer of the pattern to the substrate.
This book presents a complete theoretical and practical
treatment of the topic of lithography for both students and
researchers. It comprises ten detailed chapters plus three
appendices with problems provided at the end of each chapter.
Additional Information:
Visiting href="http://www.lithoguru.com/textbook/index.html">http://www.lithoguru.com/textbook/index.html enhances
the reader's understanding as the website supplies information on
how you can download a free laboratory manual, Optical Lithography
Modelling with MATLAB®, to accompany the textbook. You can
also contact the author and find help for instructors.
Autoren-Porträt von Chris Mack
Dr. Chris A. Mack developed the lithography simulation software PROLITH, and founded and ran the company FINLE Technologies fro ten years. He then served as Vice President of Lithography Technology for KLA-Tencor for five years, until 2005. In 2003 he received the SEMI Award for North America for his efforts in lithography simulation and education. He is also an adjunct faculty member at the University of Texas at Austin. Currently, he writes, teaches, and consults on the field of semiconductor microlithography in Austin, Texas.
Bibliographische Angaben
- Autor: Chris Mack
- 2011, 1. Auflage, 534 Seiten, Englisch
- Verlag: John Wiley & Sons
- ISBN-10: 1119965071
- ISBN-13: 9781119965077
- Erscheinungsdatum: 10.08.2011
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- Dateiformat: ePub
- Größe: 14 MB
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Sprache:
Englisch
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