Development and Assessment of Wafer Transport Sequencing Rules for Clustertools

Development of Sequencing Rules for Clustertools by Means of Dynamic Tool Simulation (Sprache: Englisch)
 
 
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Cluster tools have become an important tool type in the semiconductor industry during the last decade. They integrate several process chambers into a tool and enable sequential process steps within one tool and/or increase capacity and availability by using...
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Voraussichtlich lieferbar in 3 Tag(en)

Bestellnummer: 15866139

Buch49.00
Jetzt vorbestellen
Cluster tools have become an important tool type in the semiconductor industry during the last decade. They integrate several process chambers into a tool and enable sequential process steps within one tool and/or increase capacity and availability by using...

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