Introduction to VLSI Process Engineering
(Sprache: Englisch)
Integrated circuits are finding ever wider applications through a range of industries. Introduction to VLSI Process Engineering presents the design principles for devices, describes the overall VLSI process, and deals with the essential manufacturing technologies and inspection procedures.
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Klappentext zu „Introduction to VLSI Process Engineering “
Integrated circuits are finding ever wider applications through a range of industries. Introduction to VLSI Process Engineering presents the design principles for devices, describes the overall VLSI process, and deals with the essential manufacturing technologies and inspection procedures.
Inhaltsverzeichnis zu „Introduction to VLSI Process Engineering “
Preface to the English language edition. Coming age of VLSI elements. Semiconductor market. Evolution of semiconductors. Characteristics of VLSI. VLSI process engineering operations. Packaging and process monitoring technology. Production of silicon wafers and environmental. Process engineering aspects of VLSI production. References. Appendices. Index.
Bibliographische Angaben
- 1993, 228 Seiten, Maße: 16 x 24,1 cm, Gebunden, Englisch
- Herausgegeben: Y. Naka, C. McGreavy, K. Sugawara
- Verlag: Springer Netherlands
- ISBN-10: 0412395509
- ISBN-13: 9780412395505
- Erscheinungsdatum: 30.06.1993
Sprache:
Englisch
Rezension zu „Introduction to VLSI Process Engineering “
...an extremely good text... - Microelectronics Journal
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