Micro, Nanosystems and Systems on Chips

Introduction xi

PART I. MINI AND MICROSYSTEMS 1

Chapter 1. Modeling and Control of Stick-slip Micropositioning Devices 3
Micky RAKOTONDRABE, Yassine HADDAB, Philippe LUTZ

1.1. Introduction 3

1.2. General description of stick-slip micropositioning devices 4

1.3. Model of the sub-step mode 6

1.4. PI control of the sub-step mode 13

1.5. Modeling the coarsemode 15

1.6. Voltage/frequency (U/f) proportional control of the coarse mode 18

1.7. Conclusion 26

1.8. Bibliography 28

Chapter 2. Microbeam Dynamic Shaping by Closed-loop Electrostatic Actuation using Modal Control 31
Chady KHARRAT, Eric COLINET, Alina VODA

2.1. Introduction 31

2.2. System description 34

2.3. Modal analysis 36

2.4. Mode-based control 40

2.5. Conclusion 50

2.6. Bibliography 53

PART II. NANOSYSTEMS AND NANOWORLD 57

Chapter 3. Observer-based Estimation of Weak Forces in a Nanosystem Measurement Device 59
Gildas BESANÇON, Alina VODA, Guillaume JOURDAN

3.1. Introduction 59

3.2. Observer approach in an AFM measurement set-up 61

3.3. Extension to back action evasion 71

3.4. Conclusion 79

3.5. Acknowledgements 81

3.6. Bibliography 81

Chapter 4. Tunnel Current for a Robust, High-bandwidth and Ultraprecise Nanopositioning 85
Sylvain BLANVILLAIN, Alina VODA, Gildas BESANÇON

4.1. Introduction 85

4.2. System description 87

4.3. System modeling 89

4.4. Problem statement 97

4.5. Tools to deal with noise 100

4.6. Closed-loop requirements 102

4.7. Control strategy 105

4.8. Results 111

4.9. Conclusion 115

4.10. Bibliography 116

Chapter 5. Controller Design and Analysis for High-performance STM 121
Irfan AHMAD, Alina VODA, Gildas BESANÇON

5.1. Introduction 121

5.2. General description of STM 123

5.3. Control design model 127

5.4. H controller design 131

5.5. Analysis with system parametric uncertainties 139

5.6. Simulation results 142

5.7. Conclusions 143

5.8. Bibliography