Resonant MEMS

PART I. FUNDAMENTALSFundamental Theory of Resonant MEMS DevicesFrequency Response of Cantilever Beams Immersed in Viscous FluidsDamping in Resonant MEMSParametrically-Excited Micro- and NanosystemsFinite Element Modeling of ResonatorsPART II. IMPLEMENTATIONCapacitive DevicesPiezoelectric Resonant MEMSResonant MEMS Electrothermal ExcitationNanoelectromechanical Systems (NEMS)Organic Resonant MEMS DevicesDevices with Embedded ChannelsHermetic Packaging for Resonant MEMSCompensation, Tuning and Trimming of MEMS ResonatorsPART III. APPLICATIONSMEMS Inertial SensorsResonant MEMS Chemical SensorsBiosensorsFluid Properties SensorsEnergy Harvesting Devices

Oliver Brand received his diploma degree in Physics from Technical University Karlsruhe, Germany, in 1990 and his PhD degree from ETH Zurich, Switzerland, in 1994. From 1995 to 1997, he worked as a postdoctoral fellow at Georgia Tech. From 1997 to 2002, he was a lecturer at ETH Zurich and deputy director of the Physical Electronics Laboratory. In 2003, he joined the Electrical and Computer Engineering faculty at theGeorgia Institute of Technology where he is currently a Professor. Since 2014, he serves as the Executive Director of Georgia Tech?s Institute for Electronics andNanotechnology.He has co-authoredmore than 190 publications in scientific journals and conference proceedings. He is a co-editor of the Wiley-VCH book series Advanced Micro & Nanosystems, a member of the editorial board of Sensors and Materials, and has served as General Co-Chair of the 2008 IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008). Dr. Brand is a senior member of the IEEE and a co-recipient of the 2005 IEEE Donald G. Fink Prize Paper Award. His research interests are in the areas of silicon-based microsystems, microsensors, MEMS fabrication technologies, and microsystem packaging.Isabelle Dufour graduated from Ecole Normale Supérieure de Cachan in 1990 and received her PhD and HDR degrees in engineering science from the University of Paris-Sud, Orsay, France, in 1993 and 2000, respectively. She was a CNRS research fellow from 1994 to 2007, first in Cachan working on the modeling of electrostatic actuators (micromotors, micropumps) and then after 2000 in Bordeaux working on microcantilever-based chemical sensors. She is currently a Professor of electrical engineering at the University of Bordeaux, and her research interests are in the areas of microcantilever-based sensors for chemical detection, rheological measurements, material characterization, and energy harvesting.Stephen M. Heinrich earned the BS degree summa cum laude from Penn State in 1980 and