Nano-CMOS Design for Manufacturability (PDF)

Discover innovative tools that pave the way from circuit and
physical design to fabrication processing

Nano-CMOS Design for Manufacturability examines the challenges
that design engineers face in the nano-scaled era, such as
exacerbated effects and the proven design for manufacturability
(DFM) methodology in the midst of increasing variability and design
process interactions. In addition to discussing the difficulties
brought on by the continued dimensional scaling in conformance with
Moore's law, the authors also tackle complex issues in the design
process to overcome the difficulties, including the use of a
functional first silicon to support a predictable product ramp.
Moreover, they introduce several emerging concepts, including
stress proximity effects, contour-based extraction, and design
process interactions.

This book is the sequel to Nano-CMOS Circuit and Physical
Design, taking design to technology nodes beyond 65nm geometries.
It is divided into three parts:

* Part One, Newly Exacerbated Effects, introduces the newly
exacerbated effects that require designers' attention, beginning
with a discussion of the lithography aspects of DFM, followed by
the impact of layout on transistor performance

* Part Two, Design Solutions, examines how to mitigate the impact
of process effects, discussing the methodology needed to make
sub-wavelength patterning technology work in manufacturing, as well
as design solutions to deal with signal, power integrity, WELL,
stress proximity effects, and process variability

* Part Three, The Road to DFM, describes new tools needed to
support DFM efforts, including an auto-correction tool capable of
fixing the layout of cells with multiple optimization goals,
followed by a look ahead into the future of DFM

Throughout the book, real-world examples simplify complex
concepts, helping readers see how they can successfully handle
projects on Nano-CMOS nodes. It provides a bridge that allows
engineers to go from physical and circuit design to fabrication
processing and, in short, make designs that are not only
functional, but that also meet power and performance goals within
the design schedule.