Chemistry of the Semiconductor Industry
(Sprache: Englisch)
This book covers the chemistry of the major processes involved in the manufacture of integrated circuits. The authors describe all the major processes in use, together with some processes which are currently being developed and hold future promise.
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Klappentext zu „Chemistry of the Semiconductor Industry “
This book covers the chemistry of the major processes involved in the manufacture of integrated circuits. The authors describe all the major processes in use, together with some processes which are currently being developed and hold future promise.
Inhaltsverzeichnis zu „Chemistry of the Semiconductor Industry “
Overview. Semiconductor silicon. Group III-V compounds. Group II-VI semiconductors. Chemical vapour deposition. Plasma-enhanced chemical vapour deposition. Metal-organic vapour phase epitaxy. Liquid-phase epitaxy of III-V compounds. Photoresists. X-ray and E-beam resists. Wet etching. Polyimides. Molecular electronics. Computer modelling. Plasma etching. Polymers in plasmas.
Bibliographische Angaben
- Autoren: A. Ledwith , S. J. Moss
- 1989, 444 Seiten, Maße: 16 x 24,1 cm, Gebunden, Englisch
- Verlag: Springer Netherlands
- ISBN-10: 0216920051
- ISBN-13: 9780216920057
- Erscheinungsdatum: 28.02.1989
Sprache:
Englisch
Rezension zu „Chemistry of the Semiconductor Industry “
'The style and excellent choice of topics and material covered makes this book an ideal starting point for postgraduates and researchers concerned with semiconductor integrated circuit manufacture.' Chemistry in Britain
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