Introduction to Microfabrication
(Sprache: Englisch)
With nanotechnology and microengineering being among the top priority research areas for the United States and Europe over the next decade, a microfabrication text is an important and timely addition to the literature. This book provides coverage of all...
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With nanotechnology and microengineering being among the top priority research areas for the United States and Europe over the next decade, a microfabrication text is an important and timely addition to the literature. This book provides coverage of all aspects of the attempt to build functional devices at a molecular size.
Inhaltsverzeichnis zu „Introduction to Microfabrication “
From the contents:Preface. Acknowledgements.
PART I: INTRODUCTION.
PART II: MATERIALS.
PART III: BASIC PROCESSES.
PART IV: STRUCTURES.
PART V: INTEGRATION.
PART VI: TOOLS.
PART VII: MANUFACTURING.
PART VIII: FUTURE.
Appendix A: Comments and Hints to Selected Problems.
Appendix B: Constants and Conversion Factors.
Index
Bibliographische Angaben
- Autor: Sami Franssila
- 2004, XVII, 401 Seiten, mit Schwarz-Weiß-Abbildungen, mit Abbildungen, Maße: 24,5 cm, Kartoniert (TB), Englisch
- Verlag: Wiley & Sons
- ISBN-10: 0470851066
- ISBN-13: 9780470851067
Sprache:
Englisch
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