MORDA in the Semiconductor Industry
Modeling and Implementation of a System for Multivariate Offline Raw Data Analysis (MORDA) in the Semiconductor Industry
(Sprache: Englisch)
In the course of a feasibility study at the FEOL of the 300 mm semiconductor Fab of Qimonda Dresden, a system for multivariate analysis of time-resolved raw data originating from wafer processing tools was instituted. This system called MORDA (Multivariate...
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In the course of a feasibility study at the FEOL of the 300 mm semiconductor Fab of Qimonda Dresden, a system for multivariate analysis of time-resolved raw data originating from wafer processing tools was instituted. This system called MORDA (Multivariate Offline Raw Data Analysis) closed the gap between online Fault Detection and Classification basing on statistical key numbers, and offline PCA, PLS and Batch Modelling to diagnose and classify the root causes of Low Yielding Wafers that could not be explained by classical FDC.
Autoren-Porträt von Uwe Büttner
Büttner UweUwe Büttner, born 1976 in Meißen (Germany), obtained his diploma thesis in computer science at the Dresden university of technology in 2006. He is currently working as a production engineer at the 300 mm wafer fab of Qimonda Dresden in the LPCVD furnace area. He is also responsible for automation and other IT related production topics.
Bibliographische Angaben
- Autor: Uwe Büttner
- 92 Seiten, Maße: 22 cm, Kartoniert (TB), Englisch
- Verlag: VDM Verlag Dr. Müller e.K.
- ISBN-10: 3639059387
- ISBN-13: 9783639059380
Sprache:
Englisch
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