Physics of Collisional Plasmas: Introduction to High-Frequency Discharges

Foreword.- Acknowledgments.- List of symbols.- List of constants.- 1 The Plasma State: Definition and Orders of Magnitude of Principle Quantities.- 1.1 Definition and essential nature of plasma.- 1.2 Areas of research and applications (examples).- 1.3 Different types of laboratory discharges.- 1.4 Electron density and temperature of a plasma.- 1.5 natural oscillation frequency of electrons in a plasma.- 1.6 Debye length: effect of screening in the plasma.- 1.7 Collisional phenomena in plasmas.- 1.8 Mechanisms for creation and loss of charged particles in a plasma and their conservation equation.- 2 Individual Motion of a Charged Particle in Electric and Magnetic Fields.- 2.1 The general equation of motion of a charged particle in E and B fields, and properties of that equation.- 2.2 Analysis of particular cases of E and B.- 3 Hydrodynamic Description of a Plasma.- 3.1 Fundamental aspects of the Boltzmann equation.- 3.2 Velocity distribution function and the notion of correlation between particles.- 3.3 Distribution functions and hydrodynamic quantities.- 3.4 Kinetic and hydrodynamic conductivity of electrons in a plasma in the presence of a HF electromagnetic field.- 3.5 Transport equations.- 3.6 Closure of the transport equations.- 3.7 The Lorentz electron plasma model.- 3.8 Diffusion and mobility of charged particles.- 3.9 Normal modes of diffusion and spatial density distribution of charged particles.- 3.10 The ambipolar diffusion regime.- 3.11 Ambipolar diffusion in a static magnetic field.- 3.12 Diffusion regime or free fall regime.- 3.13 Electron temperature of a long plasma column governed by ambipolar diffusion: scaling law Te(pR).- 3.14 Formation and nature of sheaths at the plasma-wall.- 4 Introduction to the Physics of HF Discharges.- 4.1 Foreword.- 4.2 Power transfer from the electric field to the discharge.- 4.3 Influence of the frequency of the HF field on some plasma properties and on particular processes.- 4.4 High-pressure HF sustained plasmas.-

Michel Moisan, Professor in the Physics Department of the Université de Montréal (Québec) is a well-known specialist of HF generated discharges. He currently works on a plasma steriliser for medical devices. He is co-inventor in 31 different patents, including the surfatron and surfaguide surface-wave launchers to sustain HF discharges. Jacques Pelletier is Emeritus Research Director (CNRS) in the Laboratory of Subatomic Physics and Cosmology, Grenoble (France). He designed several generations of plasma-source technologies based on the concept of distributed elementary microwave-plasma sources. He currently works on the design of low-energy plasmas for lighting. He is co-inventor in over 40 patents. Both authors contributed to create the International Laboratory on Plasma Applications and Technologies (LITAP) with research groups from France and Québec working on different aspects of low pressure microwave plasma technologies and their application to certain domains (biology, thin films, etching). They have taught at undergraduate, graduate and postgraduate levels. Through this book, their experience as teachers and researchers in cooperation with industry is made available to all readers interested in the fascinating domain of plasma.