Tantalum Oxide Thin Films for Embedded Capacitors
Using Pulsed DC Reactive Sputtering
(Sprache: Englisch)
Embedded capacitor technology, where thin film capacitors are integrated at on-chip and/or off-chip levels, offers high packaging densities and improved electrical performance at potentially reduced costs of capacitor fabrication and integration. This...
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Embedded capacitor technology, where thin film capacitors are integrated at on-chip and/or off-chip levels, offers high packaging densities and improved electrical performance at potentially reduced costs of capacitor fabrication and integration. This research explores and establishes the leverages of using thin film embedded capacitors over currently used surface mount discrete capacitors. In particular, this work focuses on developing pulsed dc reactively sputtered tantalum oxide (Ta2O5) thin film capacitors for IC chips and packages. A design space for breakdown voltage and capacitance density of planar capacitors is established, with film thickness and material dielectric constant as parameters. The validity of the developed design space is experimentally verified with Ta2O5 thin films over a wide range of film thickness. An experimentally verified analytical model for pulsed dc reactive sputtering of Ta2O5 films is described and evaluated. Various processing and integration challenges in depositing thin films using reactive sputtering and their effects on electrical performance of thin-film capacitors are discussed.
Autoren-Porträt von PUSHKAR JAIN
JAIN PUSHKARPushkar Jain is a senior engineer at Intel,Oregon, USA. He received his Bachelor's and PhD degree in chemical engineering from IIT-Delhi India (1999), and RPI New York, USA (2003), respectively. He has published in several technical journals, and authored a book - "Thin-Film Capacitors for Packaged Electronics" (2003).
Bibliographische Angaben
- Autor: PUSHKAR JAIN
- 212 Seiten, Maße: 22 cm, Kartoniert (TB), Englisch
- Verlag: VDM Verlag Dr. Müller e.K.
- ISBN-10: 3639096622
- ISBN-13: 9783639096620
Sprache:
Englisch
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