A User's Guide to Vacuum Technology (PDF)
(Sprache: Englisch)
In the decade and a half since the publication of the Second
Edition of A User?s Guide to Vacuum Technology there have
been many important advances in the field, including spinning rotor
gauges, dry mechanical pumps, magnetically levitated turbo...
Edition of A User?s Guide to Vacuum Technology there have
been many important advances in the field, including spinning rotor
gauges, dry mechanical pumps, magnetically levitated turbo...
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In the decade and a half since the publication of the Second
Edition of A User?s Guide to Vacuum Technology there have
been many important advances in the field, including spinning rotor
gauges, dry mechanical pumps, magnetically levitated turbo pumps,
and ultraclean system designs. These, along with improved cleaning
and assembly techniques have made contamination-free manufacturing
a reality. Designed to bridge the gap in both knowledge and
training between designers and end users of vacuum equipment, the
Third Edition offers a practical perspective on today?s vacuum
technology. With a focus on the operation, understanding, and
selection of equipment for industrial processes used in
semiconductor, optics, packaging, and related coating technologies,
A User?s Guide to Vacuum Technology, Third Edition provides
a detailed treatment of this important field. While emphasizing the
fundamentals and touching on significant topics not adequately
covered elsewhere, the text avoids topics not relevant to the
typical user.
Edition of A User?s Guide to Vacuum Technology there have
been many important advances in the field, including spinning rotor
gauges, dry mechanical pumps, magnetically levitated turbo pumps,
and ultraclean system designs. These, along with improved cleaning
and assembly techniques have made contamination-free manufacturing
a reality. Designed to bridge the gap in both knowledge and
training between designers and end users of vacuum equipment, the
Third Edition offers a practical perspective on today?s vacuum
technology. With a focus on the operation, understanding, and
selection of equipment for industrial processes used in
semiconductor, optics, packaging, and related coating technologies,
A User?s Guide to Vacuum Technology, Third Edition provides
a detailed treatment of this important field. While emphasizing the
fundamentals and touching on significant topics not adequately
covered elsewhere, the text avoids topics not relevant to the
typical user.
Inhaltsverzeichnis zu „A User's Guide to Vacuum Technology (PDF)“
Vacuum Technology. Gas Properties. Gas Flow. Gas Release from Solids. Pressure Gauges. Flow Meters. Pumping Speed. Residual Gas Analyzers. Interpretation of RGA Data. Mechanical Pumps. Turbomolecular Pumps. Diffusion Pumps. Pump Fluids. Getter and Ion Pumps. Cryogenic Pumps. Materials in Vacuum. Joints, Seals, and Valves. Lubrication. Rough Vacuum Pumping. High Vacuum Systems. Ultraclean Vacuum Systems. High Flow Systems. Multichamber Systems. Leak Detection. Symbols. Appendix A. Units and Constants. Appendix B. Gas Properties. Appendix C. Material Properties. Appendix D. Isotopic Abundances. Appendix E. Cracking Patterns. Appendix F. Pump Fluid Properties. Index.
Autoren-Porträt von John F. O'Hanlon
JOHN F. O'HANLON, PHD, is Emeritus Professor of Electrical and Computer Engineering at the University of Arizona in Tucson.
Bibliographische Angaben
- Autor: John F. O'Hanlon
- 2005, 3. Auflage, 536 Seiten, Englisch
- Verlag: John Wiley & Sons
- ISBN-10: 0471467154
- ISBN-13: 9780471467151
- Erscheinungsdatum: 18.02.2005
Abhängig von Bildschirmgröße und eingestellter Schriftgröße kann die Seitenzahl auf Ihrem Lesegerät variieren.
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