System-level Modeling of MEMS / Advanced Micro and Nanosystems Bd.10 (PDF)

PHYSICAL AND MATHEMATICAL FUNDAMENTALS Introduction: Issues in Microsystems Modeling System-Level Modeling of MEMS Using Generalized Kirchhoffian Networks ? Basic Principles System-Level Modeling of MEMS by Means of Model Order Reduction(Mathematical Approximations) ? Mathematical Background Algorithmic Approaches for System-Level Simulation of MEMS and Aspects of CoSimulation LUMPED ELEMENT MODELING METHOD FOR MEMS DEVICES System-Level Modeling of Surface Micromachined Beamlike Electrothermal Microactuators System-Level Modeling of Packaging Effects of MEMS Devices Mixed-Level Approach for the Modeling of Distributed Effects in Microsystems Compact Modeling of RF-MEMS Devices MATHEMATICAL MODEL ORDER REDUCTION FOR MEMS DEVICES Moment-Matching-Based Linear Model Order Reduction for Nonparametric and Parametric Electrothermal MEMS Models Projection-Based Nonlinear Model Order Reduction Linear and Nonlinear Model Order Reduction for MEMS Electrostatic Actuators Modal-Superposition-Based Nonlinear Model Order Reduction for MEMS Gyroscopes MODELING OF ENTIRE MICROSYSTEMS Toward System-Level Simulation of Energy Harvesting Modules Application of Reduced Order Models in Circuit-Level Design for RF MEMS Devices System CAMS and Cosimulation Aspects System Level Modeling of Electromechanical Sigma ? Delta Modulators for Inertial MEMS Sensors SOFTWARE IMPLEMENTATIONS 3D Parametric-Library-Based MEMS/IC Design MOR for ANSYS SUGAR: A SPICE for MEMS Model Order Reduction Implementations in Commercial MEMS Design Environment Reduced Order Modeling of MEMS and IC Systems ? A Practical Approach A Web-Based Community for Modeling and Design of MEMS

Tamara Bechtold is post-doctoral researcher at Philips/NXP Research Laboratories in the Netherlands. She obtained her PhD from the University of Freiburg, Germany, with a thesis on microsystems simulation conducted at the Institute of Microsystems Technology in the group of Jan Korvink. She is the author of one book and many scientific publications. As of 2009, Tamara Bechtold has more than ten years of experience in modeling and simulation of MEMS.

Gabriele Schrag is currently heading a research group at the Munich University of Technology, Germany, working in the field of MEMS modeling with a focus on virtual prototyping and predictive simulation methodologies, parameter extraction, and model verification for microdevices and microsystems. She studied physics at the University of Stuttgart and received her doctorate (with honors) from the Munich University of Technology in 2002, her thesis covering the 'Modeling of Coupled Effects in Microsystems' with a special emphasis on fluid-structure interaction and viscous damping effects. Gabriele Schrag authored and co-authored more than 70 publications in technical journals and conference proceedings.

Lihong Feng is a team leader in the research group of Computational Methods in Systems and Control theory headed by Professor Peter Benner, Max Planck Institute for Dynamics of Complex Technical Systems in Magdeburg, Germany. After her PhD from Fudan University in Shanghai, China, she joined the faculty of the State Key Laboratory of Application-Specific Integrated Circuits (ASIC) & System, Fudan University, Shanghai, China. From 2007 to 2008 she was a Humboldt research fellow in the working group of Mathematics in Industry and Technology at the Technical University of Chemnitz, Germany. In 2009-2010, she worked in the Laboratory for Microsystem Simulation, Department of Microsystems Engineering, University of Freiburg, Germany. Her research interests are in the field of reduced order modelling and fast numerical

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