Fundamental Principles of Engineering Nanometrology
(Sprache: Englisch)
Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from...
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Klappentext zu „Fundamental Principles of Engineering Nanometrology “
Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study.Provides a basic introduction to measurement and instruments
Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force
Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal , variable focus, and scattering instruments)
Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties)
Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge
Inhaltsverzeichnis zu „Fundamental Principles of Engineering Nanometrology “
Introduction to metrology for micro- and nanotechnology; Some basics of measurement; Precision measurement instrumentation - some design principles; Length traceability using interferometry; Displacement measurement; Surface topography measurement instrumentation; Scanning probe and particle beam microscopy; Surface topography characterisation; Co-ordinate metrology; Mass and force measurement; References; Appendix A SI units of measurement and their realisation at NPL; Appendix B SI derived unitsAutoren-Porträt von Richard Leach
Professor Richard Leach works at National Physical Laboratory, Teddington, UK, since 1990. He is a visiting Professor of the Wolfson School for Mechanical and Manufacturing Engineering, Loughborough University. His current position is Principal Research Scientist in the Mass & Dimensional Group, Industry & Innovation Division. He is the lead scientist on three DIUS National Measurement System Engineering Measurement Programme projects: areal surface texture and structured surfaces metrology, development of low force transfer artefacts and probes for micro-coordinate measuring machines. He is also lead scientist on projects funded by DIUS Measurement for Innovators (MfI), EPSRC and EU. Professor Leach is the Measurement Service Manager for the Engineering Nanometrology Measurement Service at NPL.
Bibliographische Angaben
- Autor: Richard Leach
- 2009, 352 Seiten, Maße: 17,8 x 25,4 cm, Gebunden, Englisch
- Verlag: William Andrew
- ISBN-10: 0080964540
- ISBN-13: 9780080964546
- Erscheinungsdatum: 29.06.2011
Sprache:
Englisch
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