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Characterization of PDMS as Encapsulation for Implantable MEMS Systems

(Sprache: Englisch)
Autor: Di Sun
 
 
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Modifications to a novel multi-layered polydimethylsiloxane (PDMS) encapsulation process that include improvements to the substrate cleaning procedure and roller casting application method were developed to produce a robust non-hermetic micropackage...
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