Comprehensive Microsystems, 3 Vols.

Materials
Fabrication and Packaging
Design
Optical Systems
Chemical and Biological Systems
Emerging Topics
Physical Sensors
Actuation
Electronics for MEMS
Industrial Applications

"Comprehensive Microsystems provides in-depth description of foundations and applications of microelectromechanical systems (MEMS). This book brings an understanding of materials, fabrications, packaging, devices and electronics demanded for designing microsystems to a whole range of interested researchers not only in materials, electronics, mechanical and chemical engineering, but also working in MEMS related medical, automotive, telecoms and consumer electronic fields. In short any researcher requiring a comprehensive overview in their specific areas.

Microsystems have taken on important roles of industrial applications such as automobiles and inkjet printer. Thank to MEMS technologies, today's inkjet printers make it easy to output photo-quality images at high speeds. Microsystem market has grown up rapidly over the past twenty years and created new fields such as microchemical systems and biological systems. Several international conferences and related journals have been created. However, it becomes difficult for researchers to obtain an overview of technologies according to expanding disciplinary regions and segmentations of applications. The book provides us with both expertise and interdisciplinary subjects including emerging technologies. It is very important for researchers, who start to work on microsystems, to create innovative technologies and new fields. Extensive bibliographies of the book guide them to obtain information regarding historical backgrounds.

I recommend the book to all researchers and engineers working on microsystems and also to people having interests in the business side of microsystems." --Takayuki Yagi, Senior General Manager, Chief of Canon Research Center, Canon Inc.

"This book, with its comprehensive coverage of MEMS technology and application, provides easy access to the knowledge accumulated so far and satisfies the needs of researchers and engineers who engage in both technological and applied development of micro