Entrainment and Anchor Loss Reduction in An Optically Actuated MEMS

Modeling, Analysis and Experimental Verification (Sprache: Englisch)
 
 
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Micro Electro Mechanical Systems (MEMS) are popular alternatives to complex electronic circuits in RF systems due to their better performance, ease of fabrication and reliability. Many of these devices operate in their resonant mode and hence are limited by...
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Bestellnummer: 15769664

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Micro Electro Mechanical Systems (MEMS) are popular alternatives to complex electronic circuits in RF systems due to their better performance, ease of fabrication and reliability. Many of these devices operate in their resonant mode and hence are limited by...

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