Ion Implantation Technology: 17th International Conference on Ion Implantation Technology
(Sprache: Englisch)
The conference is focused on recent advances and emerging technologies in semiconductor processing before, during and after ion implantation. The content encompasses fundamental physical understanding, common and novel applications as well as equipment...
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Klappentext zu „Ion Implantation Technology: 17th International Conference on Ion Implantation Technology “
The conference is focused on recent advances and emerging technologies in semiconductor processing before, during and after ion implantation. The content encompasses fundamental physical understanding, common and novel applications as well as equipment issues, maintenance and design. The primary audience is process engineers in the microelectronics industry. Additional contributions come from academia and other industry segments (automotive, aerospace, and medical device manufacturing).
Bibliographische Angaben
- 2008, 556 Seiten, Maße: 22,2 x 28,2 cm, Gebunden, Englisch
- Herausgegeben: Edmund G. Seebauer, Yevgeniy V. Kondratenko, Susan B. Felch
- Verlag: AIP-Press
- ISBN-10: 0735405972
- ISBN-13: 9780735405974
Sprache:
Englisch
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