Ion Sources
(Sprache: Englisch)
While dealing with the design and operation of ion sources, this book additionally discusses the physics of ion formation of the various elements with different charge states and charge neutralization. Ion selection and beam diagnostics are equally...
Leider schon ausverkauft
versandkostenfrei
Buch
192.59 €
96 DeutschlandCard Punkte
sammeln
- Lastschrift, Kreditkarte, Paypal, Rechnung
- Kostenlose Rücksendung
- Ratenzahlung möglich
Produktdetails
Produktinformationen zu „Ion Sources “
While dealing with the design and operation of ion sources, this book additionally discusses the physics of ion formation of the various elements with different charge states and charge neutralization. Ion selection and beam diagnostics are equally included, and the presentation of the necessary equations and diagrams for the various parameters makes this a useful handbook for ion sources.
Klappentext zu „Ion Sources “
Ion implantation has become a basic technology in device manufacturing. For efficient use of this accelerator-based technique the choice of appropriate ion sources is important. This book deals with the design and operation of ion sources. Additionally the physics of ion formation of the various elements with different charge states and charge neutralization are discussed. Ion selection and beam diagnostics are part of the book too. The presentation of the necessary equations and diagrams for the various parameters makes this book useful as a handbook for ion sources.
Inhaltsverzeichnis zu „Ion Sources “
- Introduction- Gas Discharge Fundamentals
- Extraction System for Ion Sources
- Positive Ion Sources
- Giant Ion Sources
- Multiply Charged Ion Sources
- Mass and Energy Spectra of Ion Sources
- Negative Ion Sources
- Self-Neutralization of Beam Space Charge
- Beam Diagnostics for Ion Sources
Bibliographische Angaben
- Autor: Huashun Zhang
- 1999, 476 Seiten, Maße: 16 x 24,1 cm, Gebunden, Englisch
- Herausgegeben:Zhang, Jianrong
- Herausgegeben: Jianrong Zhang
- Verlag: Springer
- ISBN-10: 3540657479
- ISBN-13: 9783540657477
- Erscheinungsdatum: 08.11.1999
Sprache:
Englisch
Kommentar zu "Ion Sources"
0 Gebrauchte Artikel zu „Ion Sources“
| Zustand | Preis | Porto | Zahlung | Verkäufer | Rating |
|---|
Schreiben Sie einen Kommentar zu "Ion Sources".
Kommentar verfassen