Nanolithography and Implications on Circuit Design
(Sprache: Englisch)
This up-to-date compilation of nanolithography covers the implications of future nanometer IC designs. Topics include an introduction of nanolithography process and trends, computational lithography, lithography-aware analysis, design, and future lithography technologies.
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Produktinformationen zu „Nanolithography and Implications on Circuit Design “
This up-to-date compilation of nanolithography covers the implications of future nanometer IC designs. Topics include an introduction of nanolithography process and trends, computational lithography, lithography-aware analysis, design, and future lithography technologies.
Klappentext zu „Nanolithography and Implications on Circuit Design “
This book provides a comprehensive and updated "state-of-the-art" compilation on nanolithography and implications on future nanometer IC designs. Its scope in a bottom-up manner, includes the underlying equipment and process issues for nanolithography, the computational lithography aspects, and the key design and CAD issues and possible solutions. The subjects covered include: introduction of nanolithography process and trends; computational lithography (including lithography simulations, OPC, inverse lithography, pixilated mask, source mask optimization, etc.); lithography-aware analysis & design; and future lithography technologies and EDA impact.
This book provides a comprehensive and updated "state-of-the-art" compilation on nanolithography and implications on future nanometer IC designs. Its scope in a bottom-up manner, includes the underlying equipment and process issues for nanolithography, the computational lithography aspects, and the key design and CAD issues and possible solutions. The subjects covered include: introduction of nanolithography process and trends; computational lithography (including lithography simulations, OPC, inverse lithography, pixilated mask, source mask optimization, etc.); lithography-aware analysis & design; and future lithography technologies and EDA impact.
Inhaltsverzeichnis zu „Nanolithography and Implications on Circuit Design “
Optical Lithography Process and Trends.- Computational Lithography.- Litho-aware Analysis and Design.- Future Lithography Technologies and EDA Impact.
Bibliographische Angaben
- 400 Seiten, Maße: 15,5 x 23,5 cm, Gebunden, Englisch
- Herausgegeben von Pan, David Z.; Singh, Vivek
- Herausgegeben: David Z. Pan, Vivek Singh
- Verlag: Springer
- ISBN-10: 1441961569
- ISBN-13: 9781441961563
Sprache:
Englisch
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