Scanning Electron Microscopy
Physics of Image Formation and Microanalysis
(Sprache: Englisch)
Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents,...
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Klappentext zu „Scanning Electron Microscopy “
Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.
Inhaltsverzeichnis zu „Scanning Electron Microscopy “
Introduction.- Electron optics of a Scanning Electron Microscope.- Electron Scattering and Diffusion.- Emission of Backscattered and Secondary Electrons.- Electron Detectors and Spectrometers.- Image Contrast and Signal Processing.- Electron-Beam-Induced Current and Cathodoluminescence.- Special Techniques in SEM.- Crystal Structure Analysis by Diffraction.- Elemental Analysis and Imaging with X-Rays.-
Bibliographische Angaben
- Autoren: Rudolf Reichelt , Ludwig Reimer
- 3rd ed., 511 Seiten, 260 Abbildungen, Maße: 15,5 x 23,5 cm, Gebunden, Englisch
- Herausgegeben: Rudolf Reichelt
- Verlag: Springer
- ISBN-10: 3540853170
- ISBN-13: 9783540853176
- Erscheinungsdatum: 15.11.2020
Sprache:
Englisch
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