Simulation of Semiconductor Proces.

On-Chip Back-End Structures
- Analysis of Hot-Carrier-Induced Oxide Degradation in MOSFETs by Means of Full-Band Monte Carlo Simulation
- Acceleration of Lattice Monte Carlo Simulations and Application to Diffusion/Clustering of As at High Concentrations
- Interstitial Cluster Evolution and Transient Phenomena in Si-Crystal
- Monitoring Arsenic In-Situ Doping with Advanced Models for Poly-Silicon CVD
- Equipment and Process Simulation of Compound Semiconductor MOCVD in the Production Scale Multiwafer Planetary Reactor
- Numerical Simulation of Non-Equilibrium, Ultra-Rapid Heating of Si-Thin films by Nanosecond-Pulse Excimer Laser
- 2D Hierarchical Radio-Frequency Noise Modeling Based on a Langevin-Type Drift-Diffusion Model and Full-Band Monte-Carlo Generated Local Noise Sources
- Variance and Covariance Estimation in Stationary Monte Carlo Device Simulation
- Analysis of Gate Tunneling Current in MOS Structures using Quantum Mechanical Simulation
- 2-D Self-Consistent Solution of Schrödinger Equation, Boltzmann Transport Equation, Poisson and Current-continuity Equation for MOSFET
- Boundary Condition Models for Terminal Current Fluctuations
- Electron velocity in sub-50 nm channel MOSFETs
- 3D Statistical Simulation of Intrinsic Fluctuations in Decanano MOSFETs Introduced by Discrete Dopants, Oxide Thickness Fluctuations and LER
- Modeling of Reactive Ion Etching for Si/SiO2 Systems
- Simulation and Prediction of Aspect Ratio Dependent Phenomena during SiO2 and Si Feature Etching in Fluorocarbon Plasmas
- System Level Modeling of an Electrostatic Torsional Actuator
- Impact of Substrate Resistance on Drain Current Noise in MOSFETs
- An Efficient Frequency-Domain Analysis Technique of MOSFET Operation
- Modeling of Bias Dependent Fluctuations of Flicker Noise of MOSFETs
- Compact MOS Modeling for RF CMOS Circuit Simulation
- Statistical Analysis of VLSI Using TCAD
- Numerical Modeling of Impact-Ionization Effects on Gate-Lag Phenomena in GaAs MESFETs
- Monte Carlo Simulation of Multi-Band Carrier Transport in Semiconductor Materials with Complex Unit Cells
- Modeling Semiconductor Carbon Nanotube Rectifying Heterojunctions
- Simulation of Vertical CEO-FETs by a Coupled Solution of the Schrödinger Equation with a Hydrodynamic Transport Model
- A Computational Efficient Method for HBT Intermodulation Distortions and Two-Tone Characteristics Simulation
- Modeling the Impact of Body-to-Body Leakage in Partially -Depleted SOI CMOS Technology
- Compact Device Model for Partially Depleted SOI-MOSFETs
- Two-Dimensional Model for the Subthreshold Slope in Deep-Submicron Fully Depleted SOI MOSFETs
- 3D Thermal Analysis for SOI and its impact on Circuit Performance
- Modelling of High-Voltage SOI-LDMOS Transistors Including Self-Heating
- An Efficient Tool for Extraction of Interconnect Models in Submicron Layouts
- A Comparative Study of Two Numerical Techniques for Inductance Calculation in Interconnect Structures
- Comparison of Finite Element Stress Simulation with X-Ray Measurement for the Aluminum Conductors with different Passivation Topography
- A New Compact Spice-like Model of E2PROM Memory Cells Suitable for DC and Transient Simulations
- Simulation of Flash Memory Programming Characteristics
- A Figure of Merit for Flash Memory Multi-Layer Tunnel Dielectrics
- Enhanced Diffusion of Phosphorus due to BPSG layer in SEG-MOSFETs
- Neutron-SER Modeling and Simulation for 0.18µm CMOS Technology
- TCAD Driven Process Design of 0.151.1m Fully Depleted SOI Transistor for Low-Power Applications
- A Simulation Evaluation of 100nm CMOS Device Performance
- A Practical Approach to Modeling Strained Silicon NMOS Devices
- Accounting for Quantum Effects and Polysilicon Depletion in an Analytical Design-Oriented MOSFET Model
- Investigations of Salicided and Salicide-Blocked MOSFETs for ESD Including ESD Simulation
- Bipolar Transistor's Intrinsic and Extrinsic Capacitance Determination
- Varying Characteristics of Bipolar Transistors with Emitter Contact Window Width
- Ensemble Monte Carlo Particle Modeling of InGaAs/InP Uni-TravelingCarrier Photodiodes
- An Effective Methodology for Predicting the Distribution of MOSFET Device Characteristics Using Statistical TCAD Simulations
- Quantum Mechanical Balance Equations for Modeling Transport in Closed Electric Circuits
- A Nonlinear Iterative Method for InAs/GaAs Semiconductor Quantum Dots Simulation
- The modeling of a SOI microelectromechanical sensor
- A Computationally Efficient Model for Three-dimensional Monte Carlo Simulation of Ion Implantation into Complex Structures
- A Full-Wave Analysis for Multi-Level Interconnects Using FDTD-PML method
- Differences Between Quantum-Mechanical Capacitance-Voltage Simulators
- Investigation of a Novel Rapid Thermal Processing Concept Using an Electro-Optically Controlled Radiation Cavity
- A Shared Architecture for a Dynamic Technology Simulation Repository
- Level Set Modeling of Profile Evolution during Deposition Process
- Parameter and Coupling Ratio Extraction for SPICE-Compatible MACRO Modeling of Source Side Injection (SSI) Flash Cell
- Theoretical Calculation of a Charged Particle Detector's Response, Fabricated by Semi Insulating (SI) GaAs
- Stress Modeling of Multi Level Interconnect Schemes for Future Deep Submicron Device Generations
- Robust Method for Fast and Accurate Simulation of Random Dopant Fluctuation-Induced Vth Variation in MOSFETs with Arbitrary Complex Doping Distribution
- An Agent-Based Common Software Platform Applied to Multi-scale Device and Process simulations
- Simulation of Dark Count in Geiger Mode Avalanche Photodiodes
- Device Simulation and Measurement of Hybrid SBTT
- Two-Dimensional Diffusion Characterization of Boron in Silicon Using Reverse Modeling
- Simulation of Advanced n-MOSFET Emphasizing Quantum Mechanical Effects on 2-D Characteristics
- Vth Model of Pocket-Implant MOSFETs for Circuit Simulation
- Electrothermal Device Simulation of an ESD Protection Structure Based on Bipolar DC Characteristics
- Characterization of Low-Frequency Noise of MOSFETs Using the 2-D Device Simulator
- Electron Beam Lithography Simulation for Subquartermicron and High-Density Patterns
- Green's Function Approach for Three-Dimensional Diffusion Simulation of Industrial High-Voltage Applications
- Analysis of Ultra-short MOSFETs with High-k Gate Dielectrics
- TCAD Analysis of Gain Cell Retention Time for SRAM Applications
- Optimization for TCAD Purposes Using Bernstein Polynomials
- Advanced Hybrid Cellular Based Approach for Three-Dimensional Etching and Deposition Simulation
- A Methodology for Deep Sub-Quartermicron CMOS Technology Characterization
- A Review of Modeling Issues for RF Heterostructure Device Simulation
- Modeling and Simulation of Charge Generation Events Caused by Ion Irradiation in High-Voltage Power Devices
- Determination of the Radiation Efficiency, Contrast and Sensitivity in Electron and Ion Lithography
- Author Index