A User's Guide to Ellipsometry / Dover Civil and Mechanical Engineering (ePub)
(Sprache: Englisch)
This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Its 14 case studies illustrate concepts and reinforce...
sofort als Download lieferbar
eBook (ePub)
17.99 €
8 DeutschlandCard Punkte sammeln
- Lastschrift, Kreditkarte, Paypal, Rechnung
- Kostenloser tolino webreader
Produktdetails
Produktinformationen zu „A User's Guide to Ellipsometry / Dover Civil and Mechanical Engineering (ePub)“
This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Its 14 case studies illustrate concepts and reinforce applications of ellipsometry particularly in relation to the semiconductor industry and to studies involving corrosion and oxide growth.
A User's Guide to Ellipsometry will enable readers to move beyond limited turn-key applications of ellipsometers. In addition to its comprehensive discussions of the measurement of film thickness and optical constants in film, it also considers the trajectories of the ellipsometric parameters Del and Psi and how changes in materials affect parameters. This volume also addresses the use of polysilicon, a material commonly employed in the microelectronics industry, and the effects of substrate roughness. Three appendices provide helpful references.
A User's Guide to Ellipsometry will enable readers to move beyond limited turn-key applications of ellipsometers. In addition to its comprehensive discussions of the measurement of film thickness and optical constants in film, it also considers the trajectories of the ellipsometric parameters Del and Psi and how changes in materials affect parameters. This volume also addresses the use of polysilicon, a material commonly employed in the microelectronics industry, and the effects of substrate roughness. Three appendices provide helpful references.
Autoren-Porträt von Harland G. Tompkins
Harland G. Tompkins
Bibliographische Angaben
- Autor: Harland G. Tompkins
- 2013, 272 Seiten, Englisch
- Verlag: Guilford Publications
- ISBN-10: 0486151921
- ISBN-13: 9780486151922
- Erscheinungsdatum: 21.02.2013
Abhängig von Bildschirmgröße und eingestellter Schriftgröße kann die Seitenzahl auf Ihrem Lesegerät variieren.
eBook Informationen
- Dateiformat: ePub
- Größe: 11 MB
- Mit Kopierschutz
Sprache:
Englisch
Kopierschutz
Dieses eBook können Sie uneingeschränkt auf allen Geräten der tolino Familie lesen. Zum Lesen auf sonstigen eReadern und am PC benötigen Sie eine Adobe ID.
Kommentar zu "A User's Guide to Ellipsometry / Dover Civil and Mechanical Engineering"
0 Gebrauchte Artikel zu „A User's Guide to Ellipsometry / Dover Civil and Mechanical Engineering“
Zustand | Preis | Porto | Zahlung | Verkäufer | Rating |
---|
Schreiben Sie einen Kommentar zu "A User's Guide to Ellipsometry / Dover Civil and Mechanical Engineering".
Kommentar verfassen