Analysis of the Hole Shape Evolution in Ultrashort Pulse Laser Drilling (PDF)
(Sprache: Englisch)
Ultrashort laser pulses are capable of generating micro structures with high precision and challenging quality for electronics, optics, medical and automotive applications. However, the realization of microstructures with high aspect-ratio, especially...
sofort als Download lieferbar
eBook (pdf)
21.49 €
- Lastschrift, Kreditkarte, Paypal, Rechnung
- Kostenloser tolino webreader
Produktdetails
Produktinformationen zu „Analysis of the Hole Shape Evolution in Ultrashort Pulse Laser Drilling (PDF)“
Ultrashort laser pulses are capable of generating micro structures with high precision and challenging quality for electronics, optics, medical and automotive applications. However, the realization of microstructures with high aspect-ratio, especially microdrillings, is still a demanding task. Deep drillings show the formation of bulges, a bending of the hole and multiple capillaries. A direct investigation of the drilling process in opaque materials, especially metals, is not feasible and different explanations for the hole shape formation have been developed. The specific contribution of the possible influences on the shape formation are not fully understood yet.
In this work, an in-situ observation of drilling in an opaque material is realized for the first time. Silicon is used as a model system for laser drilling in semiconductors and metals. The influence of the processing parameters on the hole shape evolution is studied in detail, in particular for the pulse energy, pulse duration, repetition rate as well as ambient pressure. The reasons for the special drilling behavior are examined with focus on the particle deposition, the plasma interaction and the light propagation inside the hole capillary.
In this work, an in-situ observation of drilling in an opaque material is realized for the first time. Silicon is used as a model system for laser drilling in semiconductors and metals. The influence of the processing parameters on the hole shape evolution is studied in detail, in particular for the pulse energy, pulse duration, repetition rate as well as ambient pressure. The reasons for the special drilling behavior are examined with focus on the particle deposition, the plasma interaction and the light propagation inside the hole capillary.
Bibliographische Angaben
- 2014, 154 Seiten, Englisch
- Verlag: Cuvillier Verlag
- ISBN-10: 3736948670
- ISBN-13: 9783736948679
- Erscheinungsdatum: 25.11.2014
Abhängig von Bildschirmgröße und eingestellter Schriftgröße kann die Seitenzahl auf Ihrem Lesegerät variieren.
eBook Informationen
- Dateiformat: PDF
- Größe: 1.71 MB
- Ohne Kopierschutz
- Vorlesefunktion
Sprache:
Englisch
Family Sharing
eBooks und Audiobooks (Hörbuch-Downloads) mit der Familie teilen und gemeinsam genießen. Mehr Infos hier.
Kommentar zu "Analysis of the Hole Shape Evolution in Ultrashort Pulse Laser Drilling"
0 Gebrauchte Artikel zu „Analysis of the Hole Shape Evolution in Ultrashort Pulse Laser Drilling“
Zustand | Preis | Porto | Zahlung | Verkäufer | Rating |
---|
Schreiben Sie einen Kommentar zu "Analysis of the Hole Shape Evolution in Ultrashort Pulse Laser Drilling".
Kommentar verfassen