MEMS and Microsystems (PDF)

Technology/Engineering/Mechanical

A bestselling MEMS text...now better than ever.

An engineering design approach to Microelectromechanical Systems,
MEMS and Microsystems remains the only available text to cover both
the electrical and the mechanical aspects of the technology. In the
five years since the publication of the first edition, there have
been significant changes in the science and technology of
miniaturization, including microsystems technology and
nanotechnology. In response to the increasing needs of engineers to
acquire basic knowledge and experience in these areas, this popular
text has been carefully updated, including an entirely new section
on the introduction of nanoscale engineering.

Following a brief introduction to the history and evolution of
nanotechnology, the author covers the fundamentals in the
engineering design of nanostructures, including fabrication
techniques for producing nanoproducts, engineering design
principles in molecular dynamics, and fluid flows and heat
transmission in nanoscale substances.

Other highlights of the Second Edition include:

* Expanded coverage of microfabrication plus assembly and packaging
technologies

* The introduction of microgyroscopes, miniature microphones, and
heat pipes

* Design methodologies for thermally actuated multilayered device
components

* The use of popular SU-8 polymer material

Supported by numerous examples, case studies, and applied problems
to facilitate understanding and real-world application, the Second
Edition will be of significant value for both professionals and
senior-level mechanical or electrical engineering students.