Micro-Nano Technology XIV (PDF)

Volume is indexed by Thomson Reuters CPCI-S (WoS).The collection of 276 peer reviewed papers covers various high-tech fields including electronics, machinery, materials, manufacturing, testing, and disciplines of physical, chemical and biological. The papers are grouped as follows: Chapter 1: Micro and Nano Fabrication; Chapter 2: Micro Sensors; Chapter 3: Micro Actuators; Chapter 4: Microfluidics and Nanofluidics; Chapter 5: Bio MEMS and Applications; Chapter 6: Nanomaterials; Chapter 7: Optical MEMS (MOEMS); Chapter 8: Power MEMS; Chapter 9: Nano Devices and NEMS; Chapter 10: Nanobiology, Nano-Bioinformatics, Nanomedicine; Chapter 11: Packaging, Sealing and Assembling Technologies; Chapter 12: MEMS/Nano Related Research.Though CSMNT2012 is the Society's 14th conference, it is only its third international one. Over 250 papers, selected from twice that many oral and poster presentations, explore technology at the micrometer and nanometer scales from the perspectives of fabrication, sensors, actuators, fluidics, biological elecromechanical systems and applications, materials, optical electromechanical systems, power systems, nano devices, bioinformatics and medicine, and packaging and assembling. Specific topics include the design of a membrane biosensor, a sine-wave exciting circuit for a quartz vibrating gyroscope, using electrical resistance tomography to measure parameters in ice-water two-phase flow, texturing multi-crystalline silicon wafers by etching with an ultrasonic standing wave in acid, a novel fiber-optic sensing systems for detecting methane, and synthesizing biomorphic ceria templated from crucian fish scales. The volumes are numbered together and indexed in the final volume.