Silicon Sensors and Actuators (PDF)

of MEMS technologies from the first prototypes done in the Castelletto six-inch plant, to the high-volume production in Agrate Brianza. His development team along with the production team allowed ST to be the first company in the world capable of producing MEMS on 8" wfs. Ferrari currently holds more than 70 patents, many of them on Micromachining. In 2011 he received the National Award for Innovation ("Premio dei Premi") from the President of the Republic Giorgio Napolitano for the realization of the first three-axis digital gyroscope in MEMS Technology. The President of the Italian Republic, Sergio Mattarella, honored Paolo Ferrari with an important Award: "Stella al Merito del Lavoro" 2018. Paolo Ferrari graduated in Physics at the University of Milan in December 1979.





Ernesto Lasalandra is R&D General Manager in the Analog, MEMS & Sensor Group at STMicroelectronics (ST). He graduated with a degree in Electronic Engineering from the University of Pavia, Italy, and then joined ST. He has piloted successful stories with microphones, magnetic sensors, environmental sensors, mirrors, actuators, and touch sensors., and has published numerous papers and publications on MEMS technology.





Flavio Francesco Villa is a member of Technical Staff in the Analog, MEMS & Sensor Group at STMicroelectronics (ST), where he is also a member of the ST Patents Committee concerning the field of Silicon Sensors and Actuators, Package, and Smart Power Technologies. He received the "Laurea" degree (Summa cum Laude) in Solid State Physics from the University of Milan. At the invitation of the University of Pavia, he has held educational seminars on micro-sensors, integrated microcircuits, and MEMS since 2004. He is a member of the Electrochemical Society and is the author or co-author of several papers and more than eighty international patents. He was a recipient of three exceptional patent awards from the STMicroelectronics Research Division.





Sarah Zerbini is MEMS Design Director in the Analog, MEMS & Sensor Group at STMicroelectronics (ST). She received an MS degree in solid-state physics from Parma University before joining ST, where she has led the design of accelerometers, gyroscopes, magnetic sensors, mirrors, and actuators for the automotive and consumer market. She has authored more than 20 publications and 30 patents in the fields of micromachining technology, MEMS design, modeling, and characterization.