Materials Science of Thin Films

1. A Review of Materials Science 2. Vacuum Science and Technology 3. Thin-Film Evaporation Processes4. Discharges, Plasmas, and Ion-Surface Interactions5. Plasma and Ion Beam Processing of Thin Films6. Chemical Vapor Deposition7. Substrate Surfaces and Thin-Film Nucleation 8. Epitaxy9. Film Structure10. Characterization of Thin Films and Surfaces11. Interdiffusion, Reactions, and Transformations in Thin Films12. Mechanical Properties of Thin Films

Praise for the First Edition "There is a need for new, comprehensive texts and references in [advanced materials processing] and its subdisciplines. This has been especially true for thin films, and of the several recent books on the subject, Milton Ohring's extensive volume is without a doubt the best." --NATURE "Ohring's very timely and excellent book fills a long-existing need in materials education at the graduate level...The book is very well written, presented, and illustrated. It will prove useful to the scientist or engineer in coatings, to the college senior working on a project, and especially to graduate students in materials science and engineering and to faculty involved in teaching or research in the area of thin films. An excellent acquisition for an academic library." --CHOICE "The author writes in a fluent and engaging style which the student should have little trouble in understanding. His examples and technical insights do a great deal to make his text readable..." --R.J. BORG "The combination of teaching, research, and industrial involvement has provide Profesor Ohring with a broad perspective of thin film science and technoloy and tremendous insight into the needs of students entering this exciting field. His insight and experience are quite evident in this textbook." --JOHN L. VOSSEN, John Vossen Associates, Inc. "The text is easy to read, technically correct, unfolds in a logical manner, and includes a large number of important features related to thin films. I congratulate the author for proposing a thoughtful treatment of this increasingly popular subject." --CHARLES L. BAUER, Carnegie Mellon University "Professor Milt Ohring has a long and unique perspective of thin film science from his dealings with academia and industry. This book represents his accumulated experiences of teaching and research. Thin film science is at the heart of many of our most advanced technologies. This book should prove invaluable not only to the university student