Practical Guide to RF-MEMS

PREFACE RF-MEMS APPLICATIONS AND THE STATE OF THE ART IntroductionA Brief History of MEMS and RF-MEMS from the Perspective of Technology RF-MEMS Lumped ComponentsRF-MEMS Complex Networks Modeling and Simulation of RF-MEMS Devices Packaging of RF-MEMS Brief Overview of Exploitation of RF-MEMS in RF Systems Conclusions THE BOOK IN BRIEF Introduction A Brief Introduction to the FBK RF-MEMS Technology An RF-MEMS Series Ohmic Switch (Dev A) RF-MEMS Capacitive Switches/Varactors Conclusions DESIGNIntroduction Design Rules of the Fondazione Bruno Kessler RF-MEMS Technology Design of an RF-MEMS Series Ohmic Switch (Dev A) Generation of 3D Models Starting from the 2D Layout Conclusions SIMULATION TECHNIQUES (COMMERCIAL TOOLS) Introduction Static Coupled Electromechanical Simulation of the RF-MEMS Ohmic Switch (Dev A) in ANSYS MultiphysicsModal Analysis of the RF-MEMS Capacitive Switch (Dev B2) in ANSYS Multiphysics Coupled Thermoelectromechanical Simulation of the RF-MEMS Ohmic Switch with Microheaters (Dev C) in ANSYS Multiphysics RF Simulation (S-parameters) of the RF-MEMS Variable Capacitor (Dev B1) in ANSYS HFSS? Conclusions ON-PURPOSE SIMULATION TOOLS Introduction MEMS Compact Model Library A Hybrid RF-MEMS/CMOS VCO Excerpts of Verilog-A Code Implemented for MEMS Models Conclusions PACKAGING AND INTEGRATION Introduction A WLP Solution for RF-MEMS Devices and Networks Encapsulation of RF-MEMS Devices Fabrication Run of Packaged Test Structures Electromagnetic Characterization of the Package Influence of Uncompressed ACA on the RF Performance of Capped MEMS Devices Conclusions POSTFABRICATION MODELING AND SIMULATIONS Introduction Electromechanical Simulation of an RF-MEMS Varactor (Dev B2) with Compact Models RF Modeling of an RF-MEMS Varactor (Dev B2) with a Lumped Element Network Electromechanical Modeling of an RF-MEMS Series Ohmic Switch (Dev A) with Compact Models Electromagnetic Modeling and Simulation of an RF-MEMS Impedance- Matching Network (Dev E) fora GSM CMOS

Jacopo Iannacci is Researcher in MEMS technology at the Fondazione Bruno Kessler - FBK in Trento, Italy, where he focuses on (compact) modeling, design, optimization, integration, packaging and testing for reliability of MEMS/RF-MEMS devices and networks for sensors/actuators, energy harvesting and telecommunication systems. He received the PhD in Information Technology from the ARCES Research Center of the University of Bologna, Italy, and worked as Visiting Researcher at the DIMES Technology Center of the Technical University of Delft, the Netherlands, on development of packaging and integration solutions for RF-MEMS devices. Jacopo Iannacci authored and co-authored numerous scientifi c contributions for international journals and conference proceedings, as well as books and several book chapters in the fi eld of MEMS and RFMEMS technology.