Reliability of MEMS

Evaluation of Mechanical Properties of MEMS Materials and Their Standardization Elastoplastic Indentation Contact Mechanics of Homogeneous Materials and Coating-Substrate Systems Thin film Characterization Using the Bulge Test Uniaxial Tensile Test for MEMS Materials On-chip Testing of MEMS Reliability of a Capacitive Pressure Sensor Inertial Sensors High-Accuracy, High-Reliability MEMS Accelerometer Reliability of MEMS Variable Optical Attenuator Reliability of MEMS Variable Optical Attenuator (pages 239-266) Eco Scan MEMS Resonant Mirror

Osamu Tabata is Professor in the Department of Microengineering at Kyoto University. He received his MSc and PhD degrees from Nagoya Institute of Technology. From 1981 to 1996, he performed industrial research at Toyota Central Research and Development Laboratories in Aichi, Japan. He joined the Department of Mechanical Engineering of Ritsumeikan University in Shiga, Japan, in 1996, and the Department of Mechanical Engineering at Kyoto University in 2003. Osamu Tabata is engaged in the research of micro/nano processes, MEMS and micro/nano system synthetic engineering. He received numerous awards, including the Science News Award and the Research & Development Top 100 Award in 1993 and 1998.Toshiyuki Tsuchiya is Assistant Professor in the Department of Microengineering at Kyoto University. He received his PhD from Nagoya University, Japan, in 2002. From 1993 to 2004, he carried out industrial research at Toyota Central Research and Development Laboratories in Aichi, Japan. In 2004, he joined the Department of Mechanical Engineering of Kyoto University. Toshiyuki Tsuchiya's current research is focused on mechanical properties evaluation of micro/nano materials and MEMS and micro/nano system synthetic engineering.