Utke, I: Nanofabrication Using Focused Ion and Electron Beam
(Sprache: Englisch)
This book comprehensively reviews the achievements and potentials of a minimally invasive, three-dimensional, and maskless surface structuring technique operating at nanometer scale by using the interaction of focused ion and electron beams (FIB/FEB) with surfaces and injected molecules.
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Klappentext zu „Utke, I: Nanofabrication Using Focused Ion and Electron Beam “
This book comprehensively reviews the achievements and potentials of a minimally invasive, three-dimensional, and maskless surface structuring technique operating at nanometer scale by using the interaction of focused ion and electron beams (FIB/FEB) with surfaces and injected molecules.
Inhaltsverzeichnis zu „Utke, I: Nanofabrication Using Focused Ion and Electron Beam “
Introduction; I-1. Historical development of electron beam induced deposition and etching: from carbon to functional materials; I. Utke, H. Koops; I-2. Historical evolution of FIB technology: from circuit editing to nanoprototyping; Ph. Russell.; Part I. Fundamentals and Models; 1. The theory of bright field electron and field ion emission sources; R.Forbes; 2. How to select compounds for focused charged particle beam assisted etching and deposition; Tristan Bret, Patrik Hoffmann; 3. Gas Injection Systems for FEB and FIB Processing: Theory and Experiment; Vinzenz Friedli, Heinz D. Wanzenboeck, and Ivo Utke; 4. Fundamentals of interactions of electrons with molecules; John H. Moore, Petra Swiderek, Stefan Matejcik, Michael Allan; 5. Simulation of focused ion beam milling; Heung-Bae Kim, Gerhard Hobler; 6. FEB and FIB continuum models for one molecule species; Ivo Utke; 7. Continuum modeling of electron beam induced
Autoren-Porträt von Ivo Utke, Stanislav Moshkalev, Phillip Russell
Ivo Utke is Vice Head of the Laboratory for Mechanics of Materials and Nanostructures at EMPA, The Swiss Federal Laboratories for Materials Testing and Research. Stanislav Moshkalev is Head of the Nanotechnology Group at the Center for Semiconductor Components, UNICAMP, Campinas, Brazil. Phillip E. Russell is Distinguished Professor of Science Education and Physics in the Department of Physics and Astronomy, Appalachian State University.
Bibliographische Angaben
- Autoren: Ivo Utke , Stanislav Moshkalev , Phillip Russell
- 2012, XVI, 813 Seiten, Maße: 19,2 x 27 cm, Gebunden, Englisch
- Verlag: Oxford University Press
- ISBN-10: 0199734216
- ISBN-13: 9780199734214
Sprache:
Englisch
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