Silicon Anodization as a Structuring Technique (PDF)

Name: Silicon Anodization as a Structuring Technique
Brand: Gabler, Betriebswirt.-Vlg
SKU: 102854697
Price: 53.49 EUR
Availability: OnlineOnly

Literature Review, Modeling and Experiments (Sprache: Englisch)

Autor: Alexey Ivanov

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Silicon Anodization as a Structuring Technique, Alexey Ivanov

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Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.

Contents

Silicon Anodization: State of the Art
Experimental, Characterization and Simulation Methods
Microscale Study of Anodization Process
Anodization Process as a Structuring Technique: Experiments and Simulation

Target Groups

Researchers and students of microsystems technology, electrochemistry, microengineering
Practitioners in the area of microsystems, silicon processing and electrochemical material processing

Alexey Ivanov is currently working as a research scientist at the Fraunhofer Institute for Solar Energy Systems (Fraunhofer ISE, Germany) on developing and optimizing anodization processes for large-scale fabrication of semiconductor photovoltaic cells and batteries.

Autoren-Porträt von Alexey Ivanov