Digital Holography for MEMS and Microsystem Metrology

About the Editor xi
 
Contributors xiii
 
Series Preface xvii
 
Acknowledgements xix
 
Abbreviations xxi
 
1 Introduction 1
Anand Asundi
 
2 Digital Reflection Holography and Applications 7
Vijay R. Singh and Anand Asundi
 
2.1 Introduction to Digital Holography and Methods 7
 
2.1.1 Holography and Digital Holography 7
 
2.1.2 Digital Recording Mechanism 9
 
2.1.3 Numerical Reconstruction Methods 10
 
2.2 Reflection Digital Holographic Microscope (DHM) Systems Development 13
 
2.2.1 Optical Systems and Methodology 13
 
2.3 3D Imaging, Static and Dynamic Measurements 23
 
2.3.1 Numerical Phase and 3D Measurements 23
 
2.3.2 Digital Holographic Interferometry 25
 
2.4 MEMS/Microsystems Characterization Applications 31
 
2.4.1 3D Measurements 31
 
2.4.2 Static Measurements and Dynamic Interferometric Measurement 35
 
2.4.3 Vibration Analysis 39
 
References 50
 
3 Digital Transmission Holography and Applications 51
Qu Weijuan
 
3.1 Historical Introduction 51
 
3.2 The Foundation of Digital Holography 53
 
3.2.1 Theoretical Analysis of Wavefront Interference 58
 
3.2.2 Digital Hologram Recording and Reconstruction 70
 
3.2.3 Different Numerical Reconstruction Algorithms 71
 
3.3 Digital Holographic Microscopy System 73
 
3.3.1 Digital Holographic Microscopy with Physical Spherical Phase Compensation 74
 
3.3.2 Lens-Less Common-Path Digital Holographic Microscope 79
 
3.3.3 Common-Path Digital Holographic Microscope 84
 
3.3.4 Digital Holographic Microscopy with Quasi-Physical Spherical Phase Compensation: Light with Long Coherence Length 92
 
3.3.5 Digital Holographic Microscopy with Quasi-Physical Spherical Phase Compensation: Light with Short Coherence Length 99
 
3.4 Conclusion 102
 
References 104
 
4 Digital In-Line

Anand Asundi, Nanyang Technological University, Singapore
Anand Asundi is Professor and Deputy Director of the Advanced Materials Research Centre at Nanyang Technological University in Singapore. His research interests are in photomechanics and optical sensors & he has published over 200 papers in peer-reviewed journals and presented invited and plenary talks at international conferences. He has also chaired and organized numerous conferences in Singapore and other parts of the world.
He is Editor of Optics and Lasers in Engineering and on the Board of Directors of SPIE, and a fellow of the Institute of Engineers, Singapore and SPIE. He also holds advisory professorial appointments at Tongji University, Shanghai University and Harbin Institute of Technology, China. He is Chairman of the Asian Committee on Experimental Mechanics and the Asia Pacific Committee on Smart and Nano Materials both of which he co-founded.