Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set

Volume I Introduction Historical Note: The Ascent of Silicon, MEMS, and NEMS Crystallography Quantum Mechanics and the Band Theory of Solids Silicon Single Crystal Is Still King Photonics Fluidics Electrochemical and Optical Analytical Techniques Index Volume II Part I: Lithography Introduction to Part I Photolithography Next-Generation Lithographies and Lithography Research Part II: Pattern Transfer with Subtractive Techniques Introduction to Part II Dry Etching Wet Chemical Etching and Wet Bulk MicromachiningPools as Tools Thermal Energy-Based Removing MechanicalEnergy-Based Removing Part III: Pattern Transfer with Additive Techniques Introduction to Part III Physical and Chemical Vapor DepositionThin Film Properties and Surface Micromachining Chemical, Photochemical, and Electrochemical Forming Techniques Thermal Energy-Based Forming TechniquesThermoforming 10 Micromolding TechniquesLIGA Index Volume III Part I: From Traditional Manufacturing to Nanotechnology Introduction to Part I Nonlithography-Based (Traditional) and Lithography-Based (Nontraditional) Manufacturing Compared Nature as an Engineering Guide: Biomimetics Nanotechnology: Top-Down and Bottom-Up Manufacturing Approaches Compared Packaging, Assembly, and Self-Assembly Selected Materials and Processes for MEMS and NEMS 6 Metrology and MEMS/NEMS Modeling 285 Part II: Scaling Laws, Actuators, and Power and Brains in Miniature Devices Introduction to Part II Scaling Laws Actuators Power and Brains in Miniature Devices Part III: Miniaturization Application Introduction to Part III MEMS and NEMS Applications Index

University of California, Irvine, USA

"... offers the widest and yet the most detailed coverage of all essential and fundamental aspects of microfabrication and nanotechnology. The author has done an excellent and remarkable job in synthesizing such diverse material under a single umbrella." -Suman Chakraborty, IIT Kharagpur, India "Once again, Professor Madou has made an incredible contribution to the MEMS/NEMS global community in writing this series of books." -Nico de Rooij, Director, Institute of Microengineering, EPFL, Switzerland ."... [the new three-volume format] has the potential to become a 'classic' just like the one-volume predecessor... easy to read, and I found some concepts explained in ways I hadn't heard before... Very ambitious, very informative, very good for teaching!" -Jorg P. Kutter, Technical University of Denmark