MEMS: A Practical Guide of Design, Analysis, and Applications (PDF)
A new generation of MEMS books has emerged with this cohesive guide on the design and analysis of micro-electro-mechanical systems (MEMS). Leading experts contribute to its eighteen chapters that encompass a wide range of innovative and varied...
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A new generation of MEMS books has emerged with this cohesive guide on the design and analysis of micro-electro-mechanical systems (MEMS). Leading experts contribute to its eighteen chapters that encompass a wide range of innovative and varied applications. This publication goes beyond fabrication techniques covered by earlier books and fills a void created by a lack of industry standards. Subjects such as transducer operations and free-space microsystems are contained in its chapters. Satisfying a demand for literature on analysis and design of microsystems the book deals with a broad array of industrial applications. This will interest engineering and research scientists in industry and academia.
- Autoren: Jan Korvink , Oliver Paul
- 2010, 2006, 965 Seiten, Englisch
- Verlag: Springer-Verlag GmbH
- ISBN-10: 3540336559
- ISBN-13: 9783540336556
- Erscheinungsdatum: 28.05.2010
Abhängig von Bildschirmgröße und eingestellter Schriftgröße kann die Seitenzahl auf Ihrem Lesegerät variieren.
- Dateiformat: PDF
- Größe: 92 MB
- Ohne Kopierschutz
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